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PureGuard™ Oxygen dryers provide purification and filtration in one compact unit while operating at room temperature. The compact design offers long lifetime while protecting against gas purity fluctuations to ensure consistent, repeatable gas purity.
The purifiers use high surface area adsorbents to remove moisture and carbon impurities to < 1 ppb. Impurities are bonded to the surface of the reactive media via physical adsorption processes. The high surface area structure of the media helps provide a large lifetime, dependent on the inlet gas impurity levels and average flow rate. When the lifetime is consumed, the purifier can be sent back to the factory for regeneration. After the regeneration process, the purifier lifetime is completely restored to its’ original capacity. So, you get many years of use from these purifiers to help reduce ownership costs.
Typical applications include silicon and compound semiconductor processes and calibration gas for analytical instrumentation.
| Key Features | Gases
| Oxygen, CDA, N2O | | Purity | < 1 ppb H2O
| | Max pressure | 250 psig | Connection
| ¼” or ½” male VCR | | Filtration | 0.003µm metal filter (opt on 5000XL and 10MXL) | | Valves | Standard on 5000XL and 10MXL, optional on other sizes |
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| Model Numbers and Dimensions | | Model | A
inches (mm) | B
inches (mm) | Connection
Size (MVCR) | Maximum
Flow (slpm) | OG-35XL
| 3.31 (50) | 1.5 (38) | 1/4” | 1 | | OG-70XL | 4.50 (114) | 1.5 (38) | 1/4” | 3 | | OG-500XL | 7.94 (202) | 3.0 (76) | 1/4” | 60 | | OG-2500XL | 17.3 (439) | 4.0 (102) | 1/4” | 300 | | OG-5000XL | 38.52 (978) | 4.0 (102) | 1/2” | 500 | | OG-10MXL | 29.90 (759) | 6.0 (152) | 1/2” | 1000 |
Data Sheet: PureGuard OG-XL Series
Dimensional Drawings: OG-35XL | OG-70XL | OG-500XL | OG-2500XL | OG-2500XL w/ valves | OG-5000XL | OG-5000XL w/o valves | OG-10MXL | OG-10MXL w/o valves
Learn more about Oxygen Purifier Technology in our Library |