PSG Series Heated Getter

PureGuard PSG Series heated getter purifiers provide total removal of all impurities and parts-per-billion (ppb) purity for argon, helium and nitrogen. Sizes are available up to 90 Nm³/hr, and the purifier can be rated to 2,500 psi for cylinder-filling applications.

Heated getter is the ideal technology for removal of difficult impurities including nitrogen (N₂) and methane (CH₄) from rare gases. It may also be used for removal of methane (CH₄) in nitrogen. Of course, the heated getter also removes oxygen and carbon impurities.

PureGuard heated getter purifiers provide outlet purity less than 1 ppb, with typical purity levels < 100 ppt. Impurities are irreversibly removed and they cannot be released back into the gas stream. The purifier also includes a real-time end-of-life monitoring system to provide continuous display of remaining lifetime. The system monitors total gas flow correlated with inlet impurity levels and displays a ‘gas gauge’ type image to alert you when it is time to replace the getter vessel. Other competitive purifier detection methods are not accurate due to channeling and uneven breakthrough of impurities. The End-of-Life monitor from JM gives you confidence that monitoring is continuous and accurate.

Multiple purifiers can be installed in parallel flow to provide 100% redundancy or additional flow capacity.

Typical applications include bulk gas supply for silicon semiconductor and LCD manufacturing facilities or cylinder filling plants.

Key Features

• Heated getter technology
• < 1 ppb O₂, H₂O, CO, CO₂, N₂, THC
• PLC with HMI interface
• End-of-life system
• Protection from exotherm reaction
• Optional outdoor enclosures

Product Data Sheet: PSG Series Heated Getter Gas Purifiers

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